CMP / CVD 核心零配件 - 大连恒昇机械有限公司

CMP 设备关键配件CMP Tool Key Parts

面向 300mm CMP（AMAT 平台）设备的关键配件，提供修复再制造与新品供应两种模式，以下料号均已协助客户完成修复验证Key parts for 300mm AMAT CMP tools — repair/remanufacturing or new supply. All part numbers below have completed repair validation with customers

CMP Pad Conditioner DDF3

P/N 0010-28527

应用于 300mm CMP Reflexion 设备的研磨垫修整器总成。修整器直接决定研磨垫表面状态与研磨速率稳定性，属于高频维保件。已协助客户修复成功，可供应新品。 Pad conditioner assembly for 300mm CMP Reflexion tools. The conditioner directly determines pad surface condition and removal-rate stability — a high-frequency maintenance item. Repair validated; new units available.

300mmCMP Reflexion修复 + 新品Repair + New

CMP Gear Assy / Sealed Bearings

P/N 0010-19312

300mm CMP 设备传动齿轮总成与密封轴承组件。传动精度与密封可靠性直接影响研磨头运动稳定性。已协助客户修复成功，可供应新品。 Drive gear assembly with sealed bearings for 300mm CMP tools. Transmission precision and sealing reliability directly affect polishing-head motion stability. Repair validated; new units available.

300mmCMP修复 + 新品Repair + New

CMP Brush Wafer Roller Assy

P/N 0010-25973 / 0010-25969

CMP 后清洗单元晶圆滚轮总成，与晶圆边缘直接接触，对材质洁净度与尺寸精度要求苛刻。已协助客户修复成功，可供应新品。 Wafer roller assemblies for the post-CMP cleaning unit. In direct contact with the wafer edge — demanding on material cleanliness and dimensional precision. Repair validated; new units available.

300mmCMP Clean修复 + 新品Repair + New

CMP Bearing Blocks / Base Assy, Low DF Pad Conditioner

P/N 0010-33061 / 0010-25969

CMP 修整臂轴承座（Bearing Blocks REV4.3）及 Low DF 修整器基座总成，承担修整臂旋转支撑与定位功能。已协助客户完成修复。 Conditioner-arm bearing blocks (REV4.3) and Low-DF pad-conditioner base assembly, providing rotary support and positioning for the conditioner arm. Repair completed for customers.

300mmCMP修复Repair

CVD Producer Heater BlockCVD Producer Heater Block

300mm AMAT Producer 平台陶瓷加热盘升级配件，国产化配套生产Upgraded heater block for the 300mm AMAT Producer platform, in localized production

相关料号：0040-85475 / 0040-07033 / 0010-11681Related P/N: 0040-85475 / 0040-07033 / 0010-11681
新型设计有效预防原 Heater Block 的 arcing（打火）缺陷，降低意外损坏与停机风险New design effectively prevents the arcing defect of the original heater block, reducing unexpected damage and downtime
国产化配套生产，交期与成本优于进口渠道Localized production with better lead time and cost than import channels
已供货半导体龙头企业In supply to a leading semiconductor manufacturer

以上配件均可提供样品评估与失效分析；未列出的 CMP / CVD 配件（金属、陶瓷、密封类）欢迎提供料号或图纸垂询。 Sample evaluation and failure analysis available for all parts above. For unlisted CMP / CVD parts (metal, ceramic, sealing), send us the P/N or drawing.