半导体旋转导通器 - 大连恒昇机械有限公司

产品作用What It Does

旋转导通器在半导体设备中扮演关键角色：在旋转部件与固定部件之间传输流体（冷却液、气体、真空等），同时保持密封性、稳定性及洁净度。一旦导通器泄漏或颗粒超标，将直接影响腔体环境与晶圆良率。 The rotary union plays a critical role in semiconductor tools: it transfers fluids (coolant, gas, vacuum) between rotating and stationary parts while maintaining sealing integrity, stability and cleanliness. Leakage or particle excursion directly impacts chamber environment and wafer yield.

主要应用于 PVD、CVD、CMP、IMP、ALD 等核心工艺设备的旋转主轴部位，是设备维保中更换频率较高、进口依赖度较高的核心部件之一。 It is used at the rotating spindle of PVD, CVD, CMP, IMP and ALD process tools — one of the most frequently replaced and most import-dependent core parts in tool maintenance.

PVDCVDCMPIMPALDWET300mm

两种服务模式Two Service Models

① 再制造（维修）① Remanufacturing (Repair)

对用户在用的进口导通器进行拆解评估、密封件更换、精度恢复与整机测试，恢复至可用状态。相比采购原厂新品，交期更短、成本显著降低，并可结合失效分析改善薄弱环节。 We disassemble, assess and rebuild imported rotary unions in service — replacing seals, restoring precision and full-unit testing. Compared with OEM new parts: shorter lead time, significantly lower cost, plus failure analysis to reinforce weak points.

② 国产化替代（新品）② Localized Replacement (New)

基于 15 年以上动密封设计生产经验，对进口导通器进行正向设计与材料工艺优化，提供完全国产的替代新品，已在头部晶圆厂批量稳定使用。 Built on 15+ years of dynamic-sealing design experience, we deliver fully localized new units with forward design and optimized materials/processes — in volume production at leading fabs.

已供货 300mm PVD / CMP 半导体设备旋转导通器再制造及国产化替代，稳定供应中芯国际、长鑫存储等头部晶圆厂客户；PVD / CMP / WET / IMP 多款进口导通器完成开发验证。详细技术参数（转速、压力、通道数、介质、寿命数据）请联系我们获取。 300mm PVD / CMP rotary unions (remanufactured and localized) are in stable supply to leading fabs including SMIC and CXMT; multiple imported PVD / CMP / WET / IMP models have been developed and validated. Contact us for detailed specifications (speed, pressure, channels, media, lifetime data).

已覆盖料号（部分）Covered Part Numbers (Partial)

工艺Process	参考料号Reference P/N	服务Service	状态Status
PVD	0190-33463	再制造 / 国产化新品Reman. / localized new	批量供货中In volume supply
PVD	0190-40352	再制造 / 国产化新品Reman. / localized new	批量供货中In volume supply
PVD	0010-46093	再制造 / 国产化新品Reman. / localized new	批量供货中In volume supply
CMP	2328877-04	再制造 / 国产化新品Reman. / localized new	批量供货中In volume supply
CMP	E12103160	再制造 / 国产化新品Reman. / localized new	批量供货中In volume supply
IMP / WET	多款型号（详询）Multiple (on request)	再制造 / 国产化开发Reman. / localization	已完成开发验证Developed & validated